This dataset is the supporting data for the thesis entitled Coupling between gate-electrode plasmon and gate-dielectric phonon on the carrier mobility of InGaZnO thin-film transistor. It includes transfer characteristics and output characteristics of IGZO TFTs, capacitance-voltage characteristics of MOS capacitors, as well as FTIR and XPS information for La-based and Nd-based thin films. All data is in either .txt format or .pdf format so that is easily readable.