Supporting data for “On-chip integration of diamond quantum sensors”

The dataset contains the original data used in the Thesis. The file (A. introduction), mainly concludes the collected pictures in Chapter 2 of the Thesis; the file (B. GaN chip), contains the collected data and figures in Chapter 3; the file (C. Diamond membrane), contains the original data and figures in Chapter 4; and the file (D. Diamond particles) mainly contains the original data in Chapter 5.